
An SF-100 XTREME is shown on the right side. The right panel shows the locations of the utility connections for the system.

An SF-100 XTREME with the load door open is shown. The substrate is placed on the vacuum chuck through this door for processing.

An SF-100 XTREME high precsion linear drive stage from Aerotech is shown above.

This is the main screen used to program the SF-100 XTREME. It's simple graphics user interface allows the user to easily control the system in both automated and manual modes. The user has complete control over all major settings. The tabs in the upper left hand corner are used to change settings for different operational areas.
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